Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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13653930
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Filing Dt:
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10/17/2012
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Publication #:
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Pub Dt:
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06/06/2013
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Inventors:
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Kenri Konno, Tatsuya Fujii, Jun Iwashita, Daisuke Kawana, Kenta Suzuki
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Title:
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RESIST COMPOSITION FOR EUV OR EB, AND METHOD OF FORMING RESIST PATTERN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 150, NAKAMARUKO, NAKAHARA-KU, KANAGAWA-KEN |
| KAWASAKI-SHI, JAPAN |
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| NEIL S. BARTFELD |
| 2040 MAIN STREET |
| 14TH FLOOR |
| SAN DIEGO, CA 92614 |
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