Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/30/2015
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Application #:
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13632306
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Filing Dt:
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10/01/2012
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Publication #:
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Pub Dt:
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10/24/2013
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Inventors:
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Michael D. Willwerth, David Palagashvili, Michael G. Chafin, Ying-Sheng Lin
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Title:
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PLASMA REACTOR ELECTROSTATIC CHUCK WITH COOLED PROCESS RING AND HEATED WORKPIECE SUPPORT SURFACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LAW OFFICE OF ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| VENTURA, CA 93003 |
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