Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/07/2015
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Application #:
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12981305
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Filing Dt:
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12/29/2010
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Publication #:
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Pub Dt:
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07/14/2011
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Inventors:
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Hiroshi Takai, Yuichi Nakayoshi
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Title:
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METHOD FOR SHAPE MODIFICATION OF POLISHING PAD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8634 |
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| THOMAS J. ENGELLENNER |
| 155 SEAPORT BOULEVARD |
| SEAPORT WEST |
| BOSTON, MA 02210 |
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