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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/11/2015
Application #:
12752916
Filing Dt:
04/01/2010
Publication #:
Pub Dt:
10/06/2011
Inventors:
SHIFANG LI, MANUEL MADRIAGA
Title:
AUTOMATED PROCESS CONTROL USING AN ADJUSTED METROLOGY OUTPUT SIGNAL
Assignment: 1
Reel/Frame:
024177/0301Recorded: 04/01/2010Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/30/2010
Exec Dt:
03/30/2010
Assignee:
3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
4350 WEST CHANDLER BLVD.
SUITE 10/11
CHANDLER, AZ 85226

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