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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9111722
Issue Dt:
08/18/2015
Application #:
13836890
Filing Dt:
03/15/2013
Publication #:
20130278141
Pub Dt:
10/24/2013
Inventors:
Leonid Dorf, Shahid Rauf, Steven Lane, Jonathan Liu, Jason A. Kenney, Andrew Nguyen et al
Title:
THREE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH INDIVIDUALLY CONTROLLED COIL CURRENTS FROM A SINGLE RF POWER GENERATOR
Assignment: 1
Reel/Frame:
030016/0169Recorded: 03/15/2013Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DORF, LEONID
Exec Dt:
03/01/2013
RAUF, SHAHID
Exec Dt:
03/01/2013
LIU, JONATHAN
Exec Dt:
02/27/2013
KENNEY, JASON A.
Exec Dt:
03/11/2013
NGUYEN, ANDREW
Exec Dt:
03/11/2013
COLLINS, KENNETH S.
Exec Dt:
03/14/2013
RAMASWAMY, KARTIK
Exec Dt:
03/13/2013
LANE, STEVEN
Exec Dt:
03/11/2013
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
LAW OFFICE OF ROBERT M. WALLACE
2112 EASTMAN AVENUE, SUITE 102
VENTURA, CA 93003

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