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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
9119278
Issue Dt:
08/25/2015
Application #:
14109873
Filing Dt:
12/17/2013
Publication #:
20140103229
Pub Dt:
04/17/2014
Inventors:
Christopher C. Chrobak, William N. Partlo, Igor V Fomenkov, Alexander I. Ershov et al
Title:
System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output
Assignment: 1
Reel/Frame:
031839/0079Recorded: 12/23/2013Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHROBAK, CHRISTOPHER C
Exec Dt:
12/20/2013
PARTLO, WILLIAM N
Exec Dt:
12/19/2013
FOMENKOV, IGOR V
Exec Dt:
12/18/2013
ERSHOV, ALEXANDER I
Exec Dt:
12/20/2013
CROUCH, JAMES H
Exec Dt:
12/18/2013
Assignee:
CYMER, LLC
17075 THORNMINT COURT
SAN DIEGO, CALIFORNIA 92127
Correspondent:
GEORGE B. LEAVELL, ESQ.
710 LAKEWAY DRIVE
SUITE 200
SUNNYVALE, CA 94085
Assignment: 2
Reel/Frame:
032892/0177Recorded: 05/13/2014Pages: 25
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
CYMER, LLC
Exec Dt:
01/06/2014
Assignee:
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, 5500 AH NETHERLANDS

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