Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/01/2015
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Application #:
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13977638
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Filing Dt:
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05/09/2014
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Publication #:
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Pub Dt:
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10/09/2014
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PCT #:
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US2011067978
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Inventors:
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Bin Hu, Vivek K. Singh, Sungwon Kim, Chulwoo Oh, Mehmet E. Yavuz
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Title:
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MASK LAYOUT PATTERNS FOR CLOSELY SPACED PRIMITIVES IN PHASE SHIFT PHOTOLITHOGRAPHY MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BOULEVARD |
| SANTA CLARA, CALIFORNIA 95052 |
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| BLAKELY SOKOLOFF TAYLOR ZAFMAN LLC |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085-4040 |
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