Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/08/2015
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Application #:
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13212217
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Filing Dt:
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08/18/2011
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Publication #:
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Pub Dt:
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02/21/2013
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Inventors:
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Chia-Liang CHUEH, Kuo-Chou CHEN, Ren-Dou LEE, Hsien-Liang MENG, Chun-Wei LIN
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Title:
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SPUTTERING TARGET WITH REVERSE EROSION PROFILE SURFACE AND SPUTTERING SYSTEM AND METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| STEVEN E. KOFFS, DUANE MORRIS LLP |
| 30 S. 17TH ST. |
| PHILADELPHIA, PA 19103 |
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