Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/06/2015
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Application #:
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12852352
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Filing Dt:
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08/06/2010
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Publication #:
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Pub Dt:
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02/09/2012
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Inventors:
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Ali Shajii, Richard Gottscho, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti et al
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Title:
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DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY, BLDG. CA-1 |
FREMONT, CALIFORNIA 94538 |
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MARTINE PENILLA & GENCARELLA, LLP |
710 LAKEWAY DRIVE |
SUITE 200 |
SUNNYVALE, CA 94085 |
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