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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/13/2015
Application #:
13804616
Filing Dt:
03/14/2013
Publication #:
Pub Dt:
10/31/2013
Inventors:
Kenneth S. Collins, Satoru Kobayashi, Lawrence Wong, Jonathan Liu, Yang Yang et al
Title:
INDEPENDENT CONTROL OF RF PHASES OF SEPARATE COILS OF AN INDUCTIVELY COUPLED PLASMA REACTOR
Assignment: 1
Reel/Frame:
029997/0935Recorded: 03/14/2013Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/12/2013
Exec Dt:
03/12/2013
Exec Dt:
03/11/2013
Exec Dt:
02/27/2013
Exec Dt:
03/11/2013
Exec Dt:
03/11/2013
Exec Dt:
03/01/2013
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
LAW OFFICE OF ROBERT M. WALLACE
2112 EASTMAN AVENUE, SUITE 102
VENTURA, CA 93003

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