Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/13/2015
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Application #:
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13804616
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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10/31/2013
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Inventors:
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Kenneth S. Collins, Satoru Kobayashi, Lawrence Wong, Jonathan Liu, Yang Yang et al
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Title:
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INDEPENDENT CONTROL OF RF PHASES OF SEPARATE COILS OF AN INDUCTIVELY COUPLED PLASMA REACTOR
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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LAW OFFICE OF ROBERT M. WALLACE |
2112 EASTMAN AVENUE, SUITE 102 |
VENTURA, CA 93003 |
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03/28/2024 10:47 AM
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