Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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14096864
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Filing Dt:
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12/04/2013
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Publication #:
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Pub Dt:
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06/04/2015
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Inventors:
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Yu-Sheng Chang, Cheng-Hsiung Tsai, Hsiang-Huan Lee, Hai-Ching Chen, Ming-Feng Shieh et al
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Title:
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Lithography Using High Selectivity Spacers for Pitch Reduction
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| SLATER & MATSIL, L.L.P. |
| 17950 PRESTON ROAD, SUITE 1000 |
| DALLAS, TX 75252 |
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