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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9214315
Issue Dt:
12/15/2015
Application #:
14580184
Filing Dt:
12/22/2014
Publication #:
20150316941
Pub Dt:
11/05/2015
Inventors:
Fernando M. SILVEIRA, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil et al
Title:
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
Assignment: 1
Reel/Frame:
036729/0690Recorded: 10/05/2015Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MAHADESWARASWAMY, CHETAN
Exec Dt:
07/15/2011
MAYS, BRAD L.
Exec Dt:
06/07/2011
PATTAR, YASHASWINI B.
Exec Dt:
07/14/2011
SILVEIRA, FERNANDO M.
Exec Dt:
07/25/2011
TAVASSOLI, HAMID
Exec Dt:
07/25/2011
ZHOU, XIAOPING
Exec Dt:
07/25/2011
NEVIL, SHANE C.
Exec Dt:
07/26/2011
BUCHBERGER, DOUGLAS A.
Exec Dt:
07/25/2011
NGUYEN, DUY D.
Exec Dt:
07/25/2011
MERRY, WALTER R.
Exec Dt:
06/28/2011
TSONG, TINA
Exec Dt:
08/08/2011
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
BLAKELY SOKOLOFF TAYLOR & ZAFMAN LLP
1279 OAKMEAD PARKWAY
SUNNYVALE, CA 94085-4040

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