Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14161267
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Filing Dt:
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01/22/2014
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Publication #:
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Pub Dt:
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07/31/2014
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Inventors:
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Robert SUNIER, Rene HUMMEL, Cyrill KUEMIN
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Title:
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MEMBRANE-BASED SENSOR DEVICE WITH NON-DIELECTRIC ETCH-STOP LAYER AROUND SUBSTRATE RECESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LAUBISRUTISTRASSE 50 |
| STAFA, SWITZERLAND CH-8712 |
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| TONIA A. SAYOUR |
| 30 ROCKEFELLER PLAZA, 20TH FLOOR |
| COOPER & DUNHAM LLP |
| NEW YORK, NY 10112 |
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