Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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12908377
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Filing Dt:
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10/20/2010
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Publication #:
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Pub Dt:
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05/05/2011
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Inventors:
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Atsushi TAKAGI, Yoya MURAGUCHI, Tomomi FUNAYOSHI
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Title:
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EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| CANON KABUSHIKI KAISHA |
| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, 146-8501 JAPAN |
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