Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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13603130
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Filing Dt:
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09/04/2012
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Publication #:
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Pub Dt:
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03/06/2014
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Inventors:
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Theodore D. Moustakas, Adrian D. Williams
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Title:
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PLANARIZATION OF GaN BY PHOTORESIST TECHNIQUE USING AN INDUCTIVELY COUPLED
PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE SILBER WAY |
| BOSTON, MASSACHUSETTS 02215 |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| SUITE 1100 |
| BOSTON, MA 02109 |
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