Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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13631645
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Filing Dt:
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09/28/2012
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Publication #:
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Pub Dt:
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04/03/2014
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Inventors:
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Jeroen van der Burgt, Matthew R. Graham, Charles Kinney, Wayne J. Dunstan
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Title:
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System and Method to Adaptively Pre-Compensate for Target Material Push-Out to Optimize Extreme Ultraviolet Light Production
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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| GARD & KASLOW LLP |
| 4 MAIN STREET |
| SUITE 120 |
| LOS ALTOS, CA 94022 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| JEFFREY J BROOKS |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CA 92127 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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