Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/19/2016
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Application #:
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12830810
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Filing Dt:
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07/06/2010
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Publication #:
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Pub Dt:
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10/28/2010
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Inventors:
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Charles A. Taylor II, Darryl Barlett, Douglas Perry, Roy Clarke, Jason Williams
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Title:
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APPARATUS AND METHOD FOR REAL TIME MEASUREMENT OF SUBSTRATE TEMPERATURES FOR USE IN SEMICONDUCTOR GROWTH AND WAFER PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2182 BISHOP CIRCLE EAST |
| DEXTER, MICHIGAN 48130 |
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| DICKINSON WRIGHT PLLC |
| 38525 WOODWARD AVENUE |
| SUITE 2000 |
| BLOOMFIELD HILLS, MI 48304-2970 |
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