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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/16/2016
Application #:
14221555
Filing Dt:
03/21/2014
Publication #:
Pub Dt:
05/28/2015
Inventors:
Yen-Cheng Lu, Shinn-Sheng YU, Jeng-Horng CHEN, Anthony YEN
Title:
Extreme Ultraviolet Lithography Process and Mask with Reduced Shadow Effect and Enhanced Intensity
Assignment: 1
Reel/Frame:
032497/0967Recorded: 03/21/2014Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/27/2014
Exec Dt:
02/27/2014
Exec Dt:
03/03/2014
Exec Dt:
03/07/2014
Assignee:
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN 300-77
Correspondent:
HAYNES AND BOONE, LLP IP SECTION
2323 VICTORY AVENUE
SUITE 700
DALLAS, TX 75219

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