Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/16/2016
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Application #:
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14074460
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Filing Dt:
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11/07/2013
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Publication #:
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Pub Dt:
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05/15/2014
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Inventors:
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Shigeru Tahara, Boon Teik Chan
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Title:
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Etching Method Using Block-Copolymers
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KAPELDREEF 75 |
| LEUVEN, BELGIUM 3001 |
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| MCDONNELL BOEHNEN HULBERT & BERGHOFF LLP |
| 300 SOUTH WACKER DRIVE |
| CHICAGO, IL 60606 |
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