Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13455342
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Filing Dt:
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04/25/2012
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Publication #:
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Pub Dt:
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12/06/2012
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Inventors:
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Saravjeet Singh, Graeme Jamieson Scott, Ajay Kumar
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Title:
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DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVELY COUPLED PLASMA (ICP) REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP |
3040 POST OAK BOULEVARD, SUITE 1500 |
HOUSTON, TX 77056 |
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