Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13675751
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Filing Dt:
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11/13/2012
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Publication #:
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Pub Dt:
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05/30/2013
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Inventors:
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Nobuyuki Kuboi, Masanaga Fukasawa, Tetsuya Tatsumi
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Title:
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PREDICTING ULTRAVIOLET RAY DAMAGE WITH VISIBLE WAVELENGTH SPECTROSCOPY DURING A SEMICONDUCTOR MANUFACTURING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-7-1 KONAN, MINATO-KU |
| TOKYO, JAPAN 108-0075 |
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| RADER FISHMAN & GRAUER PLLC |
| LION BUILDING |
| 1233 20TH STREET N.W., SUITE 501 |
| WASHINGTON, DC 20036 |
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