Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13535603
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Filing Dt:
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06/28/2012
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Publication #:
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Pub Dt:
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01/03/2013
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Inventors:
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Ja Yul KIM, Sang Don JANG, Tae Kyu SON
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Title:
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APPARATUS AND METHOD OF CONTROLLING CHUCK, AND EXPOSURE APPARATUS AND CONTROL METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129, SAMSUNG-RO, YEONGTONG-GU |
GYEONGGI-DO |
SUWON-SI, KOREA, REPUBLIC OF |
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H.C. PARK & ASSOCIATES, PLC |
8500 LEESBURG PIKE, SUITE 7500 |
VIENNA, VA 22182 |
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