Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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14626383
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Filing Dt:
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02/19/2015
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Publication #:
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Pub Dt:
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06/11/2015
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Inventors:
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Tomoya Kumagai, Naohisa Ueno, Jun Koshiyama
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Title:
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DEVELOPING SOLUTION FOR PHOTOLITHOGRAPHY, METHOD FOR FORMING RESIST PATTERN, AND METHOD AND APPARATUS FOR PRODUCING DEVELOPING SOLUTION FOR PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 150 NAKAMARUKO |
| NAKAHARA-KU, KANAGAWA |
| KAWASAKI-SHI, JAPAN 211-0012 |
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| KNOBBE, MARTENS, OLSON & BEAR, LLP |
| 2040 MAIN ST |
| 14TH FLOOR |
| IRVINE, CA 92614 |
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