Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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14220001
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Filing Dt:
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03/19/2014
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Publication #:
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Pub Dt:
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09/24/2015
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Inventors:
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John Tolle, Matthew G. Goodman, Robert Michael Vyne, Eric R. Hill
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Title:
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PLASMA PRE-CLEAN MODULE AND PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| VERSTERKERSTRAAT 8 |
| ALMERE, NETHERLANDS 1322 AP |
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| KNOBBE MARTENS OLSON & BEAR LLP |
| 2040 MAIN STREET, 14TH FLOOR |
| IRVINE, CA 92614 |
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