Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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14157997
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Filing Dt:
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01/17/2014
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Publication #:
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Pub Dt:
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07/31/2014
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Inventors:
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Daisuke SHIMIZU, Jong Mun KIM
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Title:
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SILICON DIOXIDE-POLYSILICON MULTI-LAYERED STACK ETCHING WITH PLASMA ETCH CHAMBER EMPLOYING NON-CORROSIVE ETCHANTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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VANESSA L. YAZICIGIL |
1279 OAKMEAD PARKWAY |
SUNNYVALE, CA 94085-4040 |
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