Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/12/2016
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Application #:
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13154271
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Filing Dt:
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06/06/2011
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Publication #:
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Pub Dt:
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12/06/2012
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Inventors:
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Yukihiro Mori, Takayuki Yamagishi
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Title:
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High-Throughput Semiconductor-Processing Apparatus Equipped with Multiple Dual-Chamber Modules
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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23-1, 6-CHOME, NAGAYAMA |
TAMA-SHI, TOKYO, JAPAN 206-0025 |
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SNELL & WILMER L.L.P. / DAMON L. BOYD |
ONE ARIZONA CENTER |
400 EAST VAN BUREN STREET |
PHOENIX, AZ 85004-2202 |
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