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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9324542
Issue Dt:
04/26/2016
Application #:
14426671
Filing Dt:
03/06/2015
Publication #:
20150228459
Pub Dt:
08/13/2015
Inventors:
Naoki Matsumoto, Yugo Tomita, Naoki Mihara, Kazuki Takahashi, Michitaka Aita et al
Title:
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
035662/0990Recorded: 05/18/2015Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MATSUMOTO, NAOKI
Exec Dt:
02/26/2015
TOMITA, YUGO
Exec Dt:
02/27/2015
MIHARA, NAOKI
Exec Dt:
02/26/2015
TAKAHASHI, KAZUKI
Exec Dt:
02/26/2015
AITA, MICHITAKA
Exec Dt:
02/27/2015
YOSHIKAWA, JUN
Exec Dt:
02/27/2015
SENDA, TAKAHIRO
Exec Dt:
02/26/2015
SATO, YOSHIYASU
Exec Dt:
02/27/2015
KATO, KAZUYUKI
Exec Dt:
02/26/2015
SUDOU, KENJI
Exec Dt:
02/26/2015
MIZUSUGI, HITOSHI
Exec Dt:
03/06/2015
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
ROTHWELL, FIGG, ERNST & MANBECK, P.C.
607 14TH STREET, N.W.
SUITE 800
WASHINGTON, DC 20005

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