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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9330926
Issue Dt:
05/03/2016
Application #:
12338950
Filing Dt:
12/18/2008
Publication #:
20090184089
Pub Dt:
07/23/2009
Inventors:
Robert CHEBI, Frank LIN, Jaroslaw W. WINNICZEK, Wan-Lin CHEN, Erin MCDONNELL, Lily ZHENG et al
Title:
FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL
Assignment: 1
Reel/Frame:
022511/0707Recorded: 04/06/2009Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEBI, ROBERT
Exec Dt:
03/17/2009
LIN, FRANK
Exec Dt:
03/19/2009
WINNICZEK, JAROSLAW W.
Exec Dt:
03/03/2009
CHEN, WAN-LIN
Exec Dt:
03/04/2009
MCDONNELL, ERIN
Exec Dt:
03/04/2009
ZHENG, LILY
Exec Dt:
03/17/2009
LASSIG, STEPHAN
Exec Dt:
03/13/2009
BOGART, JEFF
Exec Dt:
03/16/2009
RUSU, CAMELIA
Exec Dt:
03/13/2009
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BEYER LAW GROUP LLP
P.O BOX 1687
CUPERTINO, CA 95015

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