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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/10/2016
Application #:
14215563
Filing Dt:
03/17/2014
Publication #:
Pub Dt:
09/17/2015
Inventor:
Kallol Bera
Title:
RF Multi-Feed Structure To Improve Plasma Uniformity
Assignment: 1
Reel/Frame:
033934/0908Recorded: 10/13/2014Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/07/2014
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
SERVILLA WHITNEY LLC
33 WOOD AVENUE SOUTH
SECOND FLOOR, SUITE 210
ISELIN, NJ 08830

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