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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9337002
Issue Dt:
05/10/2016
Application #:
13796751
Filing Dt:
03/12/2013
Publication #:
20140272459
Pub Dt:
09/18/2014
Inventors:
Hong Shih, Anthony Amadio, John Daugherty, Lin Xu, Robert G. O'Neill, Sivakami Ramanathan et al
Title:
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
Assignment: 1
Reel/Frame:
029975/0547Recorded: 03/12/2013Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DAUGHERTY, JOHN
Exec Dt:
03/04/2013
SHIH, HONG
Exec Dt:
03/04/2013
XU, LIN
Exec Dt:
03/01/2013
AMADIO, ANTHONY
Exec Dt:
03/04/2013
O'NEILL, ROBERT G.
Exec Dt:
03/01/2013
HOLLAND, PETER
Exec Dt:
03/05/2013
RAMANATHAN, SIVAKAMI
Exec Dt:
03/01/2013
KIM, TAE WON
Exec Dt:
03/04/2013
OUTKA, DUANE
Exec Dt:
03/01/2013
KERNS, JOHN MICHAEL
Exec Dt:
03/01/2013
CASTILLO, SONIA
Exec Dt:
03/01/2013
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BUCHANAN INGERSOLL & ROONEY PC
1737 KING STREET
SUITE 500
ALEXANDRIA, VA 22314

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