Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14560138
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Filing Dt:
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12/04/2014
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Publication #:
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Pub Dt:
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05/28/2015
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Inventors:
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Robert D. Edwards, Louis V. Medina, Ping-Chuan Wang, Oleg Gluschenkov, Tso-Hui Ting et al
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Title:
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IMPROVED PRESSURE SENSING AND CONTROL FOR SEMICONDUCTOR WAFER PROBING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| CANTOR COLBURN LLP - IBM FISHKILL |
| 20 CHURCH STREET |
| 22ND FLOOR |
| HARTFORD, CT 06103 |
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