Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/07/2016
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Application #:
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14168212
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Filing Dt:
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01/30/2014
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Publication #:
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Pub Dt:
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05/29/2014
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Inventors:
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Yoshiaki NOMURA, Toshinari ARAI
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Title:
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ALIGNMENT CORRECTION METHOD FOR SUBSTRATE TO BE EXPOSED, AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 134, GODO-CHO, HODOGAYA-KU |
| KANAGAWA |
| YOKOHAMA-SHI, JAPAN 240-0005 |
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| SOYEON PAK (KAREN) LAUB |
| MCDERMOTT WILL & EMERY LLP |
| 4 PARK PLAZA, SUITE 1700 |
| IRVINE, CA 92614 |
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