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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/14/2016
Application #:
14566291
Filing Dt:
12/10/2014
Publication #:
Pub Dt:
03/24/2016
Inventors:
SEUNG PARK, Anchuan Wang
Title:
SILICON ETCH PROCESS WITH TUNABLE SELECTIVITY TO SiO2 AND OTHER MATERIALS
Assignment: 1
Reel/Frame:
034778/0574Recorded: 01/21/2015Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/05/2015
Exec Dt:
01/05/2015
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
KILPATRICK TOWNSEND & STOCKTON LLP
TWO EMBARCADERO CENTER, 8TH FLOOR
ATTN: JOHN LINDEMANN
SAN FRANCISCO, CA 94111

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