Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/28/2016
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Application #:
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14242802
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Filing Dt:
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04/01/2014
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Publication #:
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Pub Dt:
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08/07/2014
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Inventors:
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Yung-Ho Chuang, Richard W. Solarz, David R. Shafer, Bin-Ming Benjamin Tsai et al
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Title:
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EUV HIGH THROUGHPUT INSPECTION SYSTEM FOR DEFECT DETECTION ON PATTERNED EUV MASKS, MASK BLANKS, AND WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEVER, HOFFMAN & HARMS, LLP |
| 901 CAMPISI WAY |
| SUITE 370 |
| CAMPBELL, CA 95008 |
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