Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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14615602
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Filing Dt:
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02/06/2015
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Publication #:
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Pub Dt:
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08/11/2016
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Inventors:
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Shengwu Chang, Kristen S. Rounds, William Leavitt, Michael St. Peter
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Title:
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APPARATUS AND METHOD TO CONTROL ION BEAM CURRENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| 022644 |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930-2297 |
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