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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9406480
Issue Dt:
08/02/2016
Application #:
14596447
Filing Dt:
01/14/2015
Publication #:
20150122993
Pub Dt:
05/07/2015
Inventors:
Nobuharu Noji, Hirosi Sobukawa, Masahiro Hatakeyama, Takeshi Murakami, Tsutomu Karimata et al
Title:
TESTING APPARATUS USING CHARGED PARTICLES AND DEVICE MANUFACTURING METHOD USING THE TESTING APPARATUS
Assignment: 1
Reel/Frame:
034785/0850Recorded: 01/22/2015Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NOJI, NOBUHARU
Exec Dt:
09/28/2004
SATAKE, TOHRU
Exec Dt:
09/28/2004
SOBUKAWA, HIROSI
Exec Dt:
09/28/2004
KIMBA, TOSHIFUMI
Exec Dt:
09/28/2004
HATAKEYAMA, MASAHIRO
Exec Dt:
09/28/2004
YOSHIKAWA, SHOJI
Exec Dt:
09/28/2004
MURAKAMI, TAKESHI
Exec Dt:
09/28/2004
WATANABE, KENJI
Exec Dt:
09/28/2004
KARIMATA, TSUTOMU
Exec Dt:
09/28/2004
SUEMATSU, KENICHI
Exec Dt:
09/28/2004
TABE, YUTAKA
Exec Dt:
09/28/2004
TAJIMA, RYO
Exec Dt:
09/28/2004
TOHYAMA, KEIICHI
Exec Dt:
09/28/2004
Assignee:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
Correspondent:
WESTERMAN, HATTORI, DANIELS & ADRIAN LLP
1250 CONNECTICUT AVENUE N.W,
SUITE 700
WASHINGTON, DC 20036

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