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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/02/2016
Application #:
14737760
Filing Dt:
06/12/2015
Inventors:
Wei Tang, Jason Daejin Park, Bart Van Schravendijk, Kaihan Ashtiani
Title:
SYSTEMS AND METHODS FOR ELIMINATING SEAMS IN ATOMIC LAYER DEPOSITION OF SILICON DIOXIDE FILM IN GAP FILL APPLICATIONS
Assignment: 1
Reel/Frame:
035842/0023Recorded: 06/12/2015Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/10/2015
Exec Dt:
06/11/2015
Exec Dt:
06/10/2015
Exec Dt:
06/09/2015
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MI 48303

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