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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9412607
Issue Dt:
08/09/2016
Application #:
14271628
Filing Dt:
05/07/2014
Publication #:
20140332372
Pub Dt:
11/13/2014
Inventors:
Akinori Kitamura, Yutaka Osada, Masayuki Kohno, Eiji Suzuki, Tomiko Kamada, Hiroto Ohtake et al
Title:
PLASMA ETCHING METHOD
Assignment: 1
Reel/Frame:
032841/0841Recorded: 05/07/2014Pages: 10
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KAMADA, TOMIKO
Exec Dt:
04/30/2014
KITAMURA, AKINORI
Exec Dt:
04/30/2014
OSADA, YUTAKA
Exec Dt:
04/30/2014
OTSUKA, YUJI
Exec Dt:
04/30/2014
KOHNO, MASAYUKI
Exec Dt:
04/30/2014
TAKINO, YUSUKE
Exec Dt:
05/01/2014
OHTAKE, HIROTO
Exec Dt:
04/29/2014
SUZUKI, EIJI
Exec Dt:
05/03/2014
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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