Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/09/2016
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Application #:
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14726044
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Filing Dt:
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05/29/2015
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Inventors:
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Bhaskar Nagabhirava, Seongjun Heo, Chih-Hsiang Wu, Ying-Ren Chen
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Title:
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HIGHLY SELECTIVE OXYGEN FREE SILICON NITRIDE ETCH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 51887 |
| PALO ALTO, CA 94303-1887 |
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