Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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14573535
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Filing Dt:
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12/17/2014
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Publication #:
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Pub Dt:
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06/23/2016
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Inventors:
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Stephen E. Greco, Rasit O. Topaloglu
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Title:
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DIVIDING LITHOGRAPHY EXPOSURE FIELDS TO IMPROVE SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION - ENDICOTT DRAFTING CENT |
| 2070 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533 |
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