Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/30/2016
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Application #:
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13511092
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Filing Dt:
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05/21/2012
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Publication #:
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Pub Dt:
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08/30/2012
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Inventors:
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Masami Shibagaki, Kaori Mashimo
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Title:
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TEMPERATURE CONTROL METHOD FOR SUBSTRATE HEAT TREATMENT APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, TEMPERATURE CONTROL PROGRAM FOR SUBSTRATE HEAT TREATMENT APPARATUS, AND RECORDING MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1 KURIGI 2-CHOME, ASAO-KU |
| KAWASAKI-SHI, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 1290 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10104-3800 |
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