Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2016
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Application #:
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13022397
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Filing Dt:
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02/07/2011
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Publication #:
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Pub Dt:
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08/18/2011
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Inventors:
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Takeshi KANEKO, Joost Jeroen Ottens, Raymond Wilhelmus Louis Lafarre
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Title:
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SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD INVOLVING AN ENCODER PLATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN, LLP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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