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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/20/2016
Application #:
14126126
Filing Dt:
03/25/2014
Publication #:
Pub Dt:
07/31/2014
Inventors:
Kinya Kato, Norio Miyake
Title:
ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Assignment: 1
Reel/Frame:
032521/0519Recorded: 03/25/2014Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/07/2014
Exec Dt:
02/07/2014
Assignee:
12-1, YURAKUCHO 1-CHOME, CHIYODA-KU
TOKYO, JAPAN 100-8331
Correspondent:
MARIO A. COSTANTINO
OLIFF, PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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