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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9524847
Issue Dt:
12/20/2016
Application #:
14060964
Filing Dt:
10/23/2013
Publication #:
20140048210
Pub Dt:
02/20/2014
Inventors:
Nobuhiro WADA, Hiroshi TSUJIMOTO, Mamoru NAOI, Makoto KOBAYASHI, Jun TAMURA, Jun OYABU
Title:
SUBSTRATE PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
031573/0353Recorded: 11/04/2013Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
WADA, NOBUHIRO
Exec Dt:
10/16/2013
KOBAYASHI, MAKOTO
Exec Dt:
10/31/2013
TSUJIMOTO, HIROSHI
Exec Dt:
10/16/2013
TAMURA, JUN
Exec Dt:
10/22/2013
NAOI, MAMORU
Exec Dt:
10/17/2013
OYABU, JUN
Exec Dt:
10/16/2013
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET
22ND FLOOR
HARTFORD, CT 06103

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