Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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13614365
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Filing Dt:
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09/13/2012
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Publication #:
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Pub Dt:
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04/11/2013
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Inventors:
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Noel Sun, Meihua Shen, Nicolas Gani, Radhika C. Mani, Chung Nang Liu
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Title:
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METHODS FOR IN-SITU CHAMBER CLEAN UTILIZED IN AN ETCHING PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP |
595 SHREWSBURY AVENUE |
SUITE 100 |
SHREWSBURY, NJ 07702 |
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