Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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13435552
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Filing Dt:
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03/30/2012
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Publication #:
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Pub Dt:
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10/04/2012
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Inventors:
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Shigeru KASAI, Taro IKEDA, Tomohito KOMATSU
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA GENERATION ANTENNA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| BRUNDIDGE & STANGER, P.C. |
| 2318 MILL ROAD |
| SUITE 1020 |
| ALEXANDRIA, VA 22314 |
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