Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14501055
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Filing Dt:
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09/30/2014
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Publication #:
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Pub Dt:
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03/31/2016
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Inventors:
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Michael Renner, Lothar Brencher
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Title:
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METHOD FOR PROCESSING A CARRIER, A METHOD FOR OPERATING A PLASMA PROCESSING CHAMBER, AND A METHOD FOR PROCESSING A SEMICONDUCTOR WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| VIERING, JENTSCHURA & PARTNER |
| 3770 HIGHLAND AVE, |
| SUITE 203 |
| MANHATTAN BEACH, CA 90266 |
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