Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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14059416
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Filing Dt:
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10/21/2013
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Publication #:
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Pub Dt:
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02/26/2015
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Inventors:
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Mang-Mang LING, Sean S. KANG, Srinivas D. NEMANI, Jungmin KO, Jeremiah T. PENDER et al
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Title:
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METHODS FOR FORMING FEATURES IN A MATERIAL LAYER UTILIZING A COMBINATION OF A MAIN ETCHING AND A CYCLICAL ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 3040 POST OAK BOULEVARD |
| SUITE 1500 |
| HOUSTON, TX 77056 |
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