Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/17/2017
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Application #:
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14387978
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Filing Dt:
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09/25/2014
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Publication #:
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Pub Dt:
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02/19/2015
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Inventors:
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Yoshihiko Yanagisawa, Tetsuaki Inada
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING METHOD INCLUDING A CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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| VOLPE AND KOENIG, P.C. |
| UNITED PLAZA |
| 30 SOUTH 17TH STREET |
| PHILADELPHIA, PA 19103 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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