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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
9567670
Issue Dt:
02/14/2017
Application #:
14584034
Filing Dt:
12/29/2014
Publication #:
20150275363
Pub Dt:
10/01/2015
Inventors:
Michael J. Sershen, Ganesh M. Sundaram, Roger R. Coutu, Mark J. Dalberth et al
Title:
METHOD FOR HIGH-VELOCITY AND ATMOSPHERIC-PRESSURE ATOMIC LAYER DEPOSITION WITH SUBSTRATE AND COATING HEAD SEPARATION DISTANCE IN THE MILLIMETER RANGE
Assignment: 1
Reel/Frame:
037254/0480Recorded: 12/04/2015Pages: 26
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SERSHEN, MICHAEL J.
Exec Dt:
12/19/2011
SUNDARAM, GANESH M.
Exec Dt:
12/22/2011
COUTU, ROGER R.
Exec Dt:
02/22/2012
BECKER, JILL S.
Exec Dt:
12/07/2011
DALBERTH, MARK J.
Exec Dt:
02/17/2012
Assignee:
CAMBRIDGE NANOTECH, INC.
ONE KENDALL SQUARE, SUITE B7301
CAMBRIDGE, MASSACHUSETTS 02139
Correspondent:
ROBERT HAYDEN
425 SHERMAN AVENUE, SUITE 230
PALO ALTO, CA 94306
Assignment: 2
Reel/Frame:
037213/0197Recorded: 12/04/2015Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
CAMBRIDGE NANOTECH, INC.
Exec Dt:
12/18/2012
Assignee:
SURTEK, INC.
3050 ZANKER ROAD
SAN JOSE, CALIFORNIA 95134
Correspondent:
ROBERT HAYDEN
425 SHERMAN AVENUE, SUITE 230
PALO ALTO, CA 94306
Assignment: 3
Reel/Frame:
037213/0348Recorded: 12/04/2015Pages: 17
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
SURTEK, INC.
Exec Dt:
03/29/2013
Assignee:
ULTRATECH, INC.
3050 ZANKER ROAD
SAN JOSE, CALIFORNIA 95134
Correspondent:
ROBERT HAYDEN
425 SHERMAN AVENUE, SUITE 230
PALO ALTO, CA 94306
Assignment: 4
Reel/Frame:
051446/0476Recorded: 12/30/2019Pages: 19
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
ULTRATECH, INC.
Exec Dt:
12/19/2019
Assignee:
VEECO INSTRUMENTS INC.
1 TERMINAL DRIVE
PLAINVIEW, NEW YORK 11803
Correspondent:
ALAN P KASS
394 ELIZABETH AVENUE
SOMERSET, NJ 08873

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